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The Center for Nanoscience and Nanotechnology of Tel Aviv University inaugurated the student laboratory for lithography at Keren Elektronim

The laboratory, which cost about a quarter of a million dollars, is a donation from AOVA Ltd. from Migdal HaEmek

From right to left: Prof. Uri Cheshnovsky, head of the Center for Nanotechnology of Tel Aviv University, Mr. Avi Farber, VP of Technologies and Sales at AVBA, and Prof. Menachem Natan, head of the Department of Physical Electronics at the Faculty of Engineering at Tel Aviv University

The Center for Nano Science and Nano Technology of Tel Aviv University this week inaugurated the student laboratory for lithography at the Elektronim Foundation, which was worth about a quarter of a million dollars, a donation from AOVA Ltd. from Migdal Hamemek.
The inauguration of the laboratory was attended by the VABA management, faculty members and students from the Nano Center and the Faculty of Engineering. Speaking at the ceremony were Prof. Menachem Natan, Head of the Department of Physical Electronics at the Faculty of Engineering, Prof. Uri Cheshnovsky, Head of the Center for Nano Science and Nano Technology of Tel Aviv University and Mr. Avi Farber, VP of Technologies and Sales at AVBA .
The laboratory includes a scanning electron microscope, on which an electron beam writing module is installed. The microscope enables the characterization and measurement of materials and devices with a spatial resolution of up to 5 nanometers. The electron beam writing module enables the writing of structures smaller than 50 nanometers. The spatial separation of the system in measuring and writing is higher than that of conventional optical systems.
This laboratory joins the array of electron microscopes at the Nano Center and Tel Aviv University used by faculty and students to characterize and create nanometric devices (millionths of a millimeter). The ease of use allows student researchers to self-activate the system, thereby acquiring skill in one of the main building blocks of "writing" devices and shapes in nanometric dimensions used in advanced microelectronics and nanotechnology processes.
The establishment of the laboratory is another step in Tel Aviv University's effort to develop multidisciplinary research in the field of nanotechnology. The laboratory, like all the services of the Center for Nano Science and Nano Technology, is open to researchers in academia and industry.
AVBA Ltd. is an engineering services company specializing in the supply of equipment and services for research and development and the high-tech industry in the fields of semiconductors. The company's managers, some of whom are graduates of the University's Faculty of Engineering, have for a long time supported the advancement of the University's research and infrastructure and previously served as consultants for the establishment of the Miniaturization Laboratory (MEMS) of the Department of Physical Electronics and also donated Hall Effect measurement equipment for the Nano Technologies Center with a financial value of approximately 15,000 dollar.

Photo from the inauguration ceremony of the laboratory.

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